Digital Holographic Methods by Stephan Stuerwald

Author:Stephan Stuerwald
Language: eng
Format: epub
ISBN: 9783030001698
Publisher: Springer International Publishing

4.4.2 Experimental Results

Measurements on Calibration Gratings

The TGZ02 test chart for the axial calibration is depicted in Fig. 4.19. A ROI of 10 m 10 m is analysed according to DIN EN ISO 5436-1 (2006), where only the surface of an inner part of one step is taken into consideration for calculating characteristic parameters like the roughness. The results for the TGZ02 are summarised in Table 4.1. Here, the measuring mode 1 in non-contact mode has the highest deviation with regard to the specification of 82.5 ± 1.5 nm.

Fig. 4.19a AFM-measurement of the calibration grating TGZ02 with a ROI of 10 m 10 m in 2D-(a) and 3D-representation; b A profile with indicated regions in red used for the analysis according to DIN EN ISO 5436-1 (2006) in c

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